Topic 7. Nanometrology/Nanomanipulation/Nanofabrication
Session Chair:
- Dr. Daniel Chua, National University of Singapore (Singapore)
- Dr. Peter C.T. Ha, Nanyang Techological University (Singapore)
The ability to fabricate nano-dimensional materials is a starting point whereas the ability to fabricate, characterize and manipute these nano-sized materials is the next step towards device fabrication and commercialization. This session combines the main developmental area for nanotechnology, which encompasses nanofabrication, nanometrology and nanomanipulation.
The field of nanomaterials extends across the full range of traditional materials classes and it is the science of manipulation and measurement at the nanoscale level that is a crucial role in producing nanomaterial devices. Hence, this session focuses on metrology, manipulating and fabricating of these so call nanomaterials including fabrication, examine and measure of materials over a wide range of lengths, from millimetres down to angstroms in both 2D and 3D, and not limited to any specific type of materials or applications.
Topics include but not limited to:-
- Nanofabrication: Advanced fabrication and lithography techniques which include e-beam lithography, scanning probe microscope (SPM) lithography, EUV and x-ray lithography, Dip-pen nanolithography. Other techniques such as FIB, Imprint nanolithography, light coupling nanolithography are welcomed.
- Nanometrology: Advanced instrumentation and characterization tools for nanoscale materials and structures, such as SPM, TEM, SEM are all welcomed. This also includes but not limited to other advanced characterization techniques such as XPS, AES, SIMS, XRD, Raman, Photoluminescence/Electroluminescence Spectroscopy, Zeta potential.
- Nanomanipulation: Advanced manipulation of nanomaterials either through self-assembly or SPM techniques. In addition, other ways of manipulation using MEMS/NEMS techniques are also welcomed.
